自润滑Cr/C复合镀层的制备和机械性能研究  

Study on mechanical properties and preparation of self-lubricating Cr/C composite coatings

作　　者：贾贵西[1] 李言[1] 李洪涛[2] 胡鹏飞[2] 张翔[2] 蒋百灵[2] 

机构地区：[1]西安理工大学机械与精密仪器工程学院,陕西西安710048 [2]西安理工大学材料科学与工程学院,陕西西安710048

出　　处：《功能材料》2010年第7期1150-1153,1157,共5页Journal of Functional Materials

基　　金：国家高技术研究发展计划(863计划)资助项目(2005AA33H010)

摘　　要：采用闭合场非平衡磁控溅射技术,固定碳靶电流参数,调节铬靶电流参数,在GCr15轴承钢球、45#钢和单晶硅基体上制备出自润滑Cr/C复合镀层。用XRD对镀层相结构进行分析,测试了镀层的摩擦系数、磨损率、结合强度、硬度和韧性,用光学显微镜观察镀层磨损形貌。结果表明,镀层相结构为非晶态,随铬靶电流变大逐渐向晶态转变;与未镀层的基体相比,镀层有良好的摩擦磨损性能和载荷承载能力;镀层随铬靶电流增加,硬度逐渐降低,韧性逐渐提高。所获铬电流为0.1和0.3A镀层有很好的自润滑性能,且后者有良好的综合机械性能。Self-lubricating Cr/C composite coatings were deposited on GCr15 bearing steel balls,45# steel and single crystal silicon substrates by closed field unbalanced magnetron sputtering ion plating technique with same sputtering carbon current and different sputtering chromium current.Coatings microstructure was analyzed by the XRD,friction and wear behaviors,adhesion,hardness and toughness were tested,coatings wear scars were observed by the OM.Results indicate that coatings microstructrue are amorphous phase structure,with chromium target current increased,and gradual transition to crystal phase structure.Compared to the uncoatings,coatings have excellent friction and wear performance and Payload capacity behaviors.At chromium current of 0.1 to 1.0A,coatings hardness gradually decreased and toughness gradually strengthened.The coatings of chromium current 0.1 and 0.3A have better self-lubricating properties,and the latter has the best comprehensively mechanical properties.

关 键 词：磁控溅射 溅射工艺参数 Cr/C自润滑镀层 机械性能 

分 类 号：TB43[一般工业技术] TG113.25[金属学及工艺—物理冶金]