非晶碳膜及掺氮非晶碳膜的制备及光学性质的比较  

FABRICATION AND OPTICAL CHARACTERIZATION OF AMORPHOUS CARBON FILMS AND NITROGEN CONTAINING AMORPHOUS CARBON FILMS

作　　者：张月蘅[1] 徐政[1] 甘肇强[2] 

机构地区：[1]同济大学材料学院,上海200092 [2]苏州大学物理系,苏州215006

出　　处：《功能材料与器件学报》1999年第1期27-32,共6页Journal of Functional Materials and Devices

摘　　要：用射频磁控溅射法成功地制备了非晶碳薄膜及掺氮非晶碳薄膜。拉曼光谱表征表明所沉积的非晶碳薄膜是非晶结构，具有类金刚石特性。对所制备的掺氮非晶碳薄膜用光电子能谱和红外光谱进行了表征。同时还研究了两种薄膜的光学性质，为该类薄膜的实际应用提供了可靠的实验依据。The amorphous carbon films (α-C) and the nitrogen containing films are prepared by Rf magnetron sputtering. The structure of α-C thin films is investigated by Raman spectra, which shows that the films are of amorphous structure and have diamond-like characteristics. The nitrogen containing films are also studied by using XPS spectra and IR spectra. The reliable experiment data for the practical application of these two kinds of film are provided through optical characterization.

关 键 词：非晶碳薄膜 掺氮非晶碳薄膜 光学性质 制备 

分 类 号：O484.1[理学—固体物理] O484.41[理学—物理]