溅射气氛中O_2/Ar体积比对Al_xO_y薄膜结构及性能的影响  

Effect of O_2/Ar Ratio on Structure and Performance of Al_xO_y Film in Sputtering Atmosphere

作　　者：林晶[1] 孙智慧[1] 刘壮[1] 

机构地区：[1]哈尔滨商业大学,哈尔滨150028

出　　处：《包装工程》2010年第15期7-9,共3页Packaging Engineering

基　　金："十一五"国家科技支撑计划项目(2006BAD05A05);黑龙江省教育厅科学技术研究项目(11541079)

摘　　要：为了研制高阻隔性和适合微波加热的包装材料,在PET基底上采用射频电源,以纯Al为靶,氧气为反应气体,高纯氩气为等离子体,磁控溅射AlxOy/PET包装薄膜。红外光谱(IR)分析表明,氧化铝IR谱的峰值、强度和带宽等规律性的变化与通入的氧气量有关。XPS研究发现,Al-O伸缩振动峰的波数越高,AlxOy中氧原子的含量越高。薄膜的阻隔性测试结果表明,AlxOy膜的y值越大,其阻隔性能越好。In order to develop the packaging material with high barrier property that is suitable for microwave heating,radio-frequency power supply was adopted on the PET substrate,pure Al was taken as the target,oxygen was taken as the reactant gas and high purity argon was taken as plama for magnetron sputtering to AlxOy/PET packaging film.Infrared spectrum（IR） analysis shows that regular change in the peak value,intensity and bandwidth of the aluminum oxide IR spectrum is related to the supplied quantity of oxygen.It is discovered by XPS research that the higher the stretching vibration peak of Al-O is,the higher the content of oxygen atom in AlxOy is.The barrier property test result of film shows that the greater the y value of AlxOy is,the better its barrier property is.

关 键 词：AlxOy/PET薄膜 磁控溅射 氧氩比 阻隔性 

分 类 号：TB333[一般工业技术—材料科学与工程] TB484.3