Experimental and theoretical investigation of zinc diffusion in N-GaSb  

作　　者：YE Hong TANG LiangLiang MA YuLong 

机构地区：[1]Department of Thermal Science and Energy Engineering, University of Science and Technology of China, Hefei 230027, China

出　　处：《Chinese Science Bulletin》2010年第23期2489-2496,共8页

基　　金：supported by the National Basic Research Program of China (2009CB939900);National High-Tech Research and Development Program of China (2007AA05Z236);Anhui Province Foundation (2007Z011)

摘　　要：Zinc diffusion process in N-GaSb was studied with excessive,appropriate and insufficient quantity of diffusion source (zinc pellets).Kink-and-tail type zinc concentration profiles obtained with appropriate zinc pellets quantity were successfully simulated using the assumption that the vacancy mechanism mediated by V0Ga and kick-out mechanism mediated by I+Ga take effect at the same time.It is found out that for diffusion temperature from 460°C to 500°C,the zinc surface concentration of the diffused samples has nearly no change and the logarithmic value of the zinc surface diffusion coefficient is linear with the reciprocal value of diffusion temperature;when the diffusion temperature is constant,both the zinc surface concentration and diffusion coefficient do not change with diffusion time.Zinc diffusion process in N-GaSb was studied with excessive, appropriate and insufficient quantity of diffusion source （zinc pel- lets）. Kink-and-tail type zinc concentration profiles obtained with appropriate zinc pellets quantity were successfully simulated using the assumption that the vacancy mechanism mediated by V^0Ga and kick-out mechanism mediated by I^＋Ga. take effect at the same time. It is found out that for diffusion temperature from 460℃ to 500℃, the zinc surface concentration of the diffused samples has nearly no change and the logarithmic value of the zinc surface diffusion coefficient is linear with the reciprocal value of diffusion temperature; when the diffusion temperature is constant, both the zinc surface concentration and diffusion coefficient do not change with diffusion time.

关 键 词：扩散实验 锌浓度 锑化镓 表面扩散系数 扩散温度 扩散时间 扩散过程 配置文件 

分 类 号：O483[理学—固体物理]