A novel closed-form resistance model for trapezoidal interconnects  

作　　者：陈宝君 唐祯安 余铁军 

机构地区：[1]School of Electronic Science and Technology,Dalian University of Technology [2]School of Electronics and Information Engineering,Dalian Jiaotong University [3]Department of R&D,Sigrity Inc,USA

出　　处：《Journal of Semiconductors》2010年第8期93-97,共5页半导体学报（英文版）

基　　金：Project supported by the National Natural Science Foundation of China(No.90607003).

摘　　要：A closed-form model for the frequency-dependent per-unit-length resistance of trapezoidal cross-sectional interconnects is presented.The frequency-dependent per-unit-length resistance R（f） of a trapezoidal interconnect line is first obtained by a numerical method.Using the method we quantify the trapezoid edge effect on the resistance of the interconnect and the current density distribution in the cross section.Based on this strict numerical result,a novel closed-form model R（f） for a single trapezoidal interconnect is fitted out using the Levenberg-Marquardt method. This R（f） can be widely used for analyzing on-chip interconnects when the frequency is changing.The model is computationally very efficient with respect to the numerical method,and the results are found to be accurate.A closed-form model for the frequency-dependent per-unit-length resistance of trapezoidal cross-sectional interconnects is presented.The frequency-dependent per-unit-length resistance R（f） of a trapezoidal interconnect line is first obtained by a numerical method.Using the method we quantify the trapezoid edge effect on the resistance of the interconnect and the current density distribution in the cross section.Based on this strict numerical result,a novel closed-form model R（f） for a single trapezoidal interconnect is fitted out using the Levenberg-Marquardt method. This R（f） can be widely used for analyzing on-chip interconnects when the frequency is changing.The model is computationally very efficient with respect to the numerical method,and the results are found to be accurate.

关 键 词：INTERCONNECT RESISTANCE Levenberg-Marquardt method 

分 类 号：TN402[电子电信—微电子学与固体电子学]