热超声键合中温度对换能系统驱动的研究  

Study on the influence of temperature on the driving signals of transducer system in thermosonic bonding

作　　者：张亚楠[1] 韩雷[1] 王彦芳[2] 

机构地区：[1]中南大学现代复杂装备设计与极端制造教育部重点实验室,长沙410083 [2]石家庄铁道学院,石家庄050043

出　　处：《现代制造工程》2010年第8期27-30,共4页Modern Manufacturing Engineering

基　　金：国家973重点基础研究发展计划基金项目(2009CB724203)

摘　　要：在热超声引线键合过程中,超声功率设置和键合温度是影响键合质量和换能系统行为的重要因素。通过实验采集不同超声功率设置和不同键合温度下键合过程中换能系统两端的驱动电流和电压信号。计算得到换能系统两端实际加载功率。分析不同功率设置下键合温度对换能系统驱动的影响规律。解释功率设置和温度导致系统驱动改变的可能原因。结果表明:不同的功率设置下,温度对换能系统驱动影响存在不同规律。较小功率设置下,温度对驱动影响较大。功率设置越大,温度对驱动影响逐步变小。这些实验数据和结果有助于进一步研究键合过程中参数间的相互影响规律。In thermosonic wire bonding process,the bonding power setting and bonding temperature are important factors to the bonding quality and the behavior of transducer.Bonding experiments were carried out at different power setting and temperature setting.The driving voltage,current signal of the transducer were monitored,then its effective ultrasonic power was obtained by computing.The influence laws of temperature on the driving signals were analyzed.The possible reason was given.The results show that the influence laws are not the same at different power setting.At a lower power setting,the temperature has an obvious influence on its driving signals.The larger power setting is,the greater influence on the driving signals the temperature has.These experimentally obtained data and results could conduce to further studying about the interaction of bonding parameters.

关 键 词：热超声键合 键合温度 键合功率 换能系统 

分 类 号：O426.9[理学—声学] TB559[理学—物理]