非晶硅太阳电池生产线的技术进步  

Technical progress in production line of amorphous silicon solar cells

作　　者：赵益萍 彭俊杰[1] 汪光武 豆玉华[1] 于培诺[1] 

机构地区：[1]北京北仪创新真空技术有限责任公司,北京102600

出　　处：《真空》2010年第4期17-21,共5页Vacuum

摘　　要：北京北仪创新真空技术有限责任公司(以下简称北仪)自行设计并成功研制了中国国内首条、整机全部国产化的非晶硅薄膜太阳电池生产线;经过多个用户生产线的建设深刻认识到:核心技术的提升必须依靠自主创新;技术进步需要工艺与设备配套研发、交替提升。北仪建设了具有产业化能力的薄膜太阳电池实验中心;创建了含有"‘在线实验室’的可创新薄膜太阳电池生产线",本文介绍了该生产线的核心设备以及关键工艺步骤中"在线实验室"所起的作用。该生产线的核心设备为等离子体增强化学气相沉积系统(Plasma Enhanced Chemical Vapor Deposition,PECVD),在"在线实验室"的指导下,通过对该系统的稳定性和膜层均匀性的改进以及电池I层厚度和P层材料带隙的优化,得到了性能更优的同质双结非晶硅太阳电池。The first production line of amorphous silicon thin film solar cells in China was designed and developed by BEIYI,ie.,the Beijing Beiyi Innovation Vacuum Technology Co.,Ltd,where all the equipment units of the line were made in China.The basic lesson to us as getting from the development of the line is that updating the core technology should depend on our own autonomous innovation and that the technological progress needs the RD combining technological process with equipment units,ie.,forming a mutual updating process.A Thin Film Solar Cell RD Center was established in BEIYI for mass production,with an Online Lab provided to make the production line innovative.The main parts of such a line were described especially what role the Online Lab plays in some key processes.The core equipment units in the line are for the Plasma Enhanced Chemical Vapor Deposition（PECVE） system whose stability and the homogeneity of the thin films deposited via the system were both improved by Online Lab,as well as the optimization of the thickness of intrinsic layer（I-layer） and the bandgap of P-type doping layer（P-layer）.Then,as a result,the better homogeneous amorphous silicon thin film solar cells with double PN junction were obtained.

关 键 词：非晶硅太阳电池 生产线 在线实验室 PECVD 带隙 

分 类 号：TM914.42[电气工程—电力电子与电力传动]