基于压电陶瓷的超精密进给系统的设计与分析  

Design and analysis of ultra-precision feeding system based on piezoelectric ceramics

作　　者：周虎[1] 杨建国[1] 陈少梅[1] 

机构地区：[1]东华大学机械工程学院,上海201620

出　　处：《机械设计》2010年第8期23-27,共5页Journal of Machine Design

基　　金：上海市重点学科建设资助项目(B602)

摘　　要：超精密进给系统是保证零件尺寸加工精度的重要因素。文中以压电陶瓷作为驱动器构建了微位移机构,讨论了系统的总体结构,研究和分析了系统模型和控制方法,通过实验计算得到前馈控制模型数据,并在此基础上对超精密进给闭环控制系统进行方案设计。最后进行了超精密进给系统在磨床上的应用及其性能测试,并对实验结果进行了分析。Ultra-precision feeding system is an important factor to assure the machining accuracy of part dimensions. In this paper, the piezoelectric ceramics is used as driver to construct a micro-motion mechanism, the overall structure of the system is discussed, and system model and control method were also studied and analyzed. The feed forward control data has been calculated through test, and the plan design for the ultra-precision feeding closed-loop control system has also been carried out based on this data. Finally, the application of the ultra-precision feeding system on the grinding machine and the performance tests were carried out, and the analysis on experimental results was also carried out.

关 键 词：压电陶瓷 超精密进给 微位移机构 

分 类 号：TH161[机械工程—机械制造及自动化] TH703.8