射频微机电系统开关软磁悬臂梁微电镀工艺  

Microelectroplation for Soft Magnetic Cantilever of Radio Frequency Microelectromechanical System Switch

作　　者：吴军民[1] 汤学华[2] 

机构地区：[1]上海电机学院汽车学院,上海200245 [2]上海电机学院机械学院,上海200245

出　　处：《上海电机学院学报》2010年第4期193-196,共4页Journal of Shanghai Dianji University

摘　　要：研究了一种电磁型射频(RF)微机电系统(MEMS)开关的软磁悬臂梁的制备工艺。为了得到适合MEMS器件应用的镍铁合金磁性薄膜,展开微电镀工艺分析,采用振动样品磁强计测量镍铁合金薄膜的磁参量。实验结果:最大相对磁导率约为460,薄膜矫顽力约为490 A/m,饱和磁感应强度约为0.9 T,剩磁感应强度为0.03～0.06 T。此结果为开关结构设计优化提供了依据。We study a soft magnetic cantilever of magnetic radio frequency（RF） microelectro mechanical system（MEMS） switch and its fabrication. Microelectroplation is studied to obtain even and low stress and an equal NiFe alloy film. As a result, a set of parameters is obtained, suitable for microelectromechanical system. The magnetic parameters are measured by vibrating sample magnetometer, with coercive force of about 490 A/m, saturated magnetic induction intensity of about 0.9 T, and residual magnetic induction intensity of about 0.03～0.06 T. This research is useful in the future optimization design.

关 键 词：微机电系统 悬臂梁 镍铁 电镀 振动样品磁强计 

分 类 号：TQ153.2[化学工程—电化学工业]