用金刚石膜的X射线衍射谱估算其热导率  

STUDY ON THE RELATION BETWEEN X-RAY DIFFRACTION SPECTRUM AND THERMAL CONDUCTIVITY OF DIAMOND FILM

作　　者：罗廷礼[1] 何奇宇[1] 王志娜[1] 崔文秀 蔡云虹[1] 刁习刚 刘秀军 

机构地区：[1]河北省机电一体化中试基地

出　　处：《河北省科学院学报》1999年第2期31-34,39,共5页Journal of The Hebei Academy of Sciences

基　　金：河北省自然科学基金

摘　　要：讨论直流电弧等离子体喷射化学气相沉积的金刚石膜其热导率和晶面取向间的关系。In this paper,the relation between crystal orientation and thermal conductivity of diamond film is discussed by DC arc plasma jet CVD.A method of evaluating thermal conductivity of diamond film is introduced by x-ray diffraction spectrum,and there are three kinds of crystal orientation in diamond film that is mainly (111) orientation.

关 键 词：金刚石膜 热导率 X射线衍射谱 估算 

分 类 号：O484.4[理学—固体物理]