薄膜厚度系统的类前馈解耦PID控制  

Similar Feed-forward Decoupling & PID Controlling of Film Thickness System

作　　者：隆媛媛[1] 蒋品群[1] 李廷会[1] 李杨帆[1] 

机构地区：[1]广西师范大学电子工程学院,广西桂林541004

出　　处：《现代电子技术》2010年第17期177-179,183,共4页Modern Electronics Technique

基　　金：广西教育厅科研项目(200608MS133);广西高校重点建设实验室资助项目(200912)

摘　　要：薄膜厚度控制系统是一个复杂的多变量耦合系统。利用相对增益矩阵对其进行了耦合性分析,并采用多变量类前馈解耦与PID控制相结合的方法,实现了系统的完全动态解耦控制。仿真结果表明,本解耦控制具有不改变主控制通道特性、控制效果好的优点,具有较大的应用价值。The film thickness control system is a complicated and multivariable coupling system. The relative gain array method is adopted to analyze the coupling of this system, the full dynamic decoupling control of the film thickness system is achieved in combination with multivariable similar-feed-forward decoupling and PID control. The experiment results show that this method has the advantages of perfect control effect without changing the characteristics of main control channel. It has great application value.

关 键 词：薄膜厚度系统 类前馈解耦 PID控制 多变量耦合 

分 类 号：TN919-34[电子电信—通信与信息系统] TP273[电子电信—信息与通信工程]