农药浓度光波导传感制备工艺研究  

The Study of Optical Waveguides Pesticides Sensor

作　　者：邹任玲[1,2] 杨帅[3] 陈抱雪[2] 王逸鸣[2] 

机构地区：[1]上海理工大学医疗器械与食品学院,上海200093 [2]上海理工大学光电学院,上海200093 [3]同济大学汽车学院,上海201804

出　　处：《农机化研究》2010年第9期58-60,64,共4页Journal of Agricultural Mechanization Research

基　　金：上海市科委科研计划支撑项目(08440510300)

摘　　要：研究了农药浓度的光波导传感制备工艺,采用磁控溅射技术,在石英基板上制备康宁1737玻璃波导的工艺;同时,分析了成膜条件以及控制膜厚的因素。实验结果表明,溅射功率和靶基距是影响溅射沉积速率的关键因素,采用射频功率为100～200W、靶基距为4～6cm,衬底温度为20～25℃、真空度为0.38Pa、溅射时间为2～4h的工艺条件可以获得较快的沉积速率并形成良好的单膜波导,可为农药浓度的检测提供一种新的方法。This paper studies the optical waveguide sensing the concentration of pesticides preparation,the corning 1737 glass waveguide formation technology were studied using magnetron sputtering on quartz substrates,and the film-forming conditions that control the film thickness were analysized. Experimental results show that sputtering power and sputtering target-substrate distance are the key factors of that deposition rate. The formation of good single-film waveguide. and a faster deposition rate can be got when RF power is 100 ～ 200W,target -substrate distance of 4 ～ 6cm,substrate temperature of 20 ～ 25 ℃ ,the vacuum degree 0. 38Pa,sputtering time of 2 ～ 4h. A new approach was provided for the detection concentration test of pesticide

关 键 词：有机磷农药 导波光学 光波导技术 磁控溅射 均匀折射率波导 

分 类 号：TP211.6[自动化与计算机技术—检测技术与自动化装置]