CO_2激光直写制作聚酰亚胺多模波导技术的研究  

Study on Co_2 laser direct writing polyimide waveguide

作　　者：朱大庆[1] 金曦[2] 

机构地区：[1]华侨大学信息学院,泉州362021 [2]华中科技大学光电子科学与工程学院,武汉430074

出　　处：《激光技术》2010年第5期686-689,共4页Laser Technology

基　　金：华侨大学校基金资助项目(09BS103)

摘　　要：为了研究适合制作大面积波导的CO_2激光直写制作聚酰亚胺多模波导技术,采用理论模拟和工艺研究的方法,通过建立激光加工模型,得到了激光扫描线的温度分布与加工参量的关系,提出了增加波导侧面陡直性的方法;通过对实验结果的分析,研究了加工参量对波导材料性能、波导结构和表面粗糙度的影响。结果表明,控制激光功率密度、直写速率和光阑位置可以控制波导的宽度、侧面陡直性和表面粗糙度。Analysis and experiments were conducted to study how to fabricate large-area polyimide multimode waveguide by means of CO2 laser direct writing. Firstly, the laser fabrication model was built. Secondly, the relationship between the temperature distribution in the material and the laser scanning parameters was simulated. Finally, a method was proposed to increase the verticality of the sidewall of the waveguide. The influence of the processing parameters on tile property of the waveguide material, the structure of the waveguide and the roughness on the surface of the waveguide was also studied by experimental method. The results show that the width, verticality and roughness of the waveguide depend on the laser power density, direct writing speed and the position of the aperture.

关 键 词：光电子学 激光直写 CO2激光 聚合物波导 

分 类 号：TN249[电子电信—物理电子学]