飞秒激光作用下薄膜的热力学研究  

Research of thermodynamics in thin film irradiated by femtosecond laser

作　　者：任乃飞[1] 顾佳方[1] 许美玲[1] 罗艳[1] 江杰[1] 陈秋月[1] 

机构地区：[1]江苏大学机械工程学院,镇江212013

出　　处：《激光技术》2010年第5期708-711,共4页Laser Technology

摘　　要：为了描述飞秒激光与金属薄膜相互作用过程中的非平衡传热现象,采用有限差分的方法对金属薄膜内的温度场进行了1维数值模拟。对双温模型中电子-晶格耦合系数G、激光脉宽和电子的弹道运动等因素对金属薄膜表层电子和晶格温度的影响进行了理论分析。结果表明,G影响材料表面电子的温升,电子和晶格温度平衡时的延迟时间随着G的增大而减小,二者呈指数变化关系。这一结果对改善半导体元件中薄膜的温升是有帮助的。To describe the non-equilibrium phenomenon in interaction between the metal thin film and femtosecond laser, the temperature field of metal film was simulated by means of finite-difference method. The effects of electron-lattice couple coefficient G, pulse width and electrical ballistic contribution on surface temperature of metal film were analyzed. The results show that G determines the surface temperature rising rate and electron-lattice couple time decreases exponentially with the increase of G. The result is helpful to improve the temperature rise of thin films in the semiconductor.

关 键 词：超快光学 非平衡 双温模型 金属薄膜 

分 类 号：O484.2[理学—固体物理]