基于单壁碳纳米管阵列的力敏传感器  

Force-sensitive Sensor Based on Single-walled Carbon Nanotube Array

作　　者：唐一科[1,2] 郑富中[1,3,4] 周兆英[3,4] 杨兴[3,4] 吴英[2] 

机构地区：[1]重庆大学机械工程学院,重庆400044 [2]重庆科技学院电气与信息工程学院,重庆401331 [3]清华大学精密仪器与机械学系微系统与控制技术研究室,北京100084 [4]清华大学精密测试技术及仪器国家重点实验室,北京100084

出　　处：《机械工程学报》2010年第18期13-17,共5页Journal of Mechanical Engineering

基　　金：国家自然科学基金资助项目(50875139;60876088)

摘　　要：利用传统的硅微加工技术,在硅片上制作出平行的微电极对,然后对硅片进行深刻蚀穿通,在微电极对之间获得长方形的贯通缝。接着利用大气流定向式的化学气相沉积方法在带有贯通缝与微电极的硅片上生长出超长单壁碳纳米管阵列,使单壁碳纳米管阵列较整齐地悬于平行电极对之间,待将生长有纳米管的硅片粘在聚氯乙稀薄板上之后,再用激光技术切除掉贯通缝的连接部分,使作用于聚氯乙稀薄板上的力能够直接传递到单壁碳纳米管阵列。引出导线,完成此微纳力敏传感器件的制作。随后主要开展悬空单壁碳纳米管阵列应变传感方面的研究,获得了较高的压阻因子与线性度。结果表明这种制作方法具有过程简单、成本低等特点,为基于碳纳米管的微纳传感器件的制作提供新的思路。Traditional silicon micro-machining technology is utilized to produce parallel micro-electrodes on silicon chips,and silicon chips are deeply etched to wear a rectangular hole between the parallel micro-electrodes.Next,ultra-long single-walled carbon nanotube（SWCNT） array is grown across micro-electrodes and rectangular hole to suspend well aligned between the parallel micro-electrodes by the method of large gas flow directional chemical vapor deposition（CVD）.The Si chip attached with SWCNTs is then mounted onto a thin PVC base and the connections of Si island are cut by laser technology,so that the force acting on the PVC base can directly transfer to SWCNT array.After extraction of wires,the fabrication of micro-nano-force-sensing unit is finished.Later,the research is carried out mainly on strain sensing of suspended SWCNT array.High gauge factor and linearity are obtained.The experimental results show that this sensor unit is simple and low in cost,thus providing a new way of thinking upon the preparation for micro-nano integrated sensor unit based on carbon nanotubes.

关 键 词：化学气相沉积 悬空单壁碳纳米管阵列 应变传感 微纳传感器件 

分 类 号：TH703.2[机械工程—仪器科学与技术]