超声换能器接触界面的非线性谐波  

Nonlinearity harmonic at contact interface in ultrasonic transducers bonding system

作　　者：李战慧[1,2] 吴运新[1] 隆志力[1] 

机构地区：[1]中南大学机电工程学院,长沙410083 [2]长沙理工大学汽车与机械工程学院,长沙410114

出　　处：《振动与冲击》2010年第9期138-141,共4页Journal of Vibration and Shock

基　　金：高等学校博士学科点专项科研基金(20060533068);国家自然科学基金(50605064);湖南省科技计划项目(2007FJ3098)

摘　　要：超声波在换能器中的非线性不仅引起劈刀振动的混乱而且导致芯片键合的失效,建立了超声波在接触界面传播的模型,并进行了数学仿真,最后在试验平台上采用多普勒测振仪测量了不同接触界面压力条件下的劈刀的振动波形,用剪切强度测试仪测试了键合强度。波形的畸变和高次谐波的产生是由于接触界面层的非线性引起的,为了保证键合强度应该将变幅杆和劈刀之间的拧紧力矩设定在一个合适的范围内,使接触界面层材料的二阶非线性系数最小。可以通过检测劈刀的高次谐波来反映超声键合的强度。Nonlinearity characteristic of ultrasonic transducers bonding system makes the capillary vibration chaos and bonding strength degradation.The model of ultrasonic propagation at contact interface between two solids was established and simulated.The vibration velocity was measured by using laser Doppler non-contact measurement device.The bond strength was tested.The wave distortion and the higher order harmonics generation arise from the nonlinearity of contact interface layer.The pre-stress should be restricted within a given range in order to enhance bonding strength.The higher harmonics of capillary are related to ultrasonic bonding strength.

关 键 词：非线性 接触界面 谐波 换能器 

分 类 号：TN305[电子电信—物理电子学]