稀土-硼共渗预处理对YG6表面金刚石薄膜质量的影响  

Effects of CeO_2 and B co-infiltration pretreatment on the quality of diamond films deposited on cemented carbide

作　　者：魏秋平[1,2] 刘培植[1] 余志明[1,2] 马莉[2] 龙航宇[1] 苏绍华[1] 

机构地区：[1]中南大学材料科学与工程学院,长沙410083 [2]中南大学粉末冶金国家重点实验室,长沙410083

出　　处：《粉末冶金材料科学与工程》2010年第4期331-337,共7页Materials Science and Engineering of Powder Metallurgy

基　　金：粉末冶金国家重点实验室开放基金资助项目(2008112048);湖南省研究生创新基金资助项目(1343-74236000005);中南大学贵重仪器开放共享基金资助项目(ZKJ2008001);中南大学优秀博士论文扶持基金资助项目(2008yb015)

摘　　要：分别对YG6(WC-wt.6%.Co)硬质合金基体表面进行常规固态渗硼和固态稀土(CeO2)共渗处理,再以甲烷和氢气为反应气体,采用热丝化学气相沉积法在合金基体表面沉积金刚石膜,通过调控灯丝功率和进气总流量制备微米晶或纳米晶金刚石膜。利用场发射扫描电镜、X射线衍射仪、激光拉曼光谱仪和洛氏硬度计对渗硼基体和金刚石膜进行检测分析,研究YG6硬质合金基体稀土硼共渗与常规固态渗硼处理对微米晶金刚石膜与纳米晶金刚石膜的物相组成、结构形貌和附着性能的影响。结果表明,与常规固态渗硼处理相比,稀土(CeO2)硼共渗样品表面残留物较少,沉积的金刚石膜样品表面粗糙度低,在1 000 N载荷下薄膜无剥落现象,表现出较好的附着性能;纳米晶金刚石膜的生长速率低于微米晶金刚石膜,但其附着性能明显优于微米晶金刚石膜。CeO2 and B co-infiltration was performed on the surface of YG6（WC-6%Co） cemented carbide fwstly, then diamond films were deposited on the pretreatment WC-6%Co substrate surface through hot filament chemical vapor deposition method using methane and hydrogen as reactive gases. The miero/nano crystalline diamond films were obtained by controlling filament power and total reactive gases flow. And the substrates and diamond films were measured by scanning electron microscopy, X-ray diffraction and Raman spectroscopy. The effects of the normal solid B infiltration and CeOz-B co-infiltration pretreatment on the phases composition, morphology and adhesion between the diamond films and substrates were investigated. Compared with normal solid B infiltration, on CeO2-B substrate surface, residues are less and the diamond films exhibit smoother surface morphology and better adhesion under a loading of 1 000 N. The growth rate of nano-erystalline diamond films is slower than that of micro-crystalline diamond films, but the adhesion between the nano-crystalline diamond films and substrates is better.

关 键 词：金刚石膜 硬质合金 纳米晶 渗硼处理 附着性能 

分 类 号：TG135.5[一般工业技术—材料科学与工程]