光学薄膜的激光损伤研究进展  

Research progress in laser induced damage on optical films

作　　者：李晓光[1,2] 沈军[1,2] 

机构地区：[1]同济大学波耳固体物理研究所,上海200092 [2]上海市特殊人工微结构材料与技术重点实验室,上海200092

出　　处：《强激光与粒子束》2010年第10期2237-2243,共7页High Power Laser and Particle Beams

基　　金：国家高技术发展计划项目;上海市科委纳米专项资助课题(0952nm00700;0952nm00900);上海市科委AM基金项目(09520714300);上海市重点实验室项目(07DZ22302)

摘　　要：从理论、实验两方面对薄膜的激光损伤机理和提高损伤阈值的手段进行了回顾。概括了现有理论模型及其适用范围,对缺陷的行为进行了多方面的论述,重点比较了各种制备方法及后处理手段的特点,分析了主要工艺参数对薄膜损伤阈值的影响。结合本实验室及国内外同行的工作,对溶胶-凝胶法制备高损伤阈值薄膜的工艺进行了总结。从吸收、热传导、抗拉强度等角度对物理膜和化学膜在结构与性能上进行了比较,提出了从化学键、成膜过程等方面分析损伤机理的建议,并结合真空污染、亚表面损伤等新问题提出了未来工作的发展方向。The mechanism of laser induced damage on optical films,and the methods to improve the laser-induced damage threshold（LIDT） were reviewed in two respects including theory and experiment.We summarized the existing theory models and their applicable scope,and also discussed the problems about defects from various aspects.The characteristics of different coating technics and after-treatment ways were compared in detail.By gathering the achievements of our own and peer institutions at home and abroad,we generalized the sol-gel technics which could be used to improve the LIDT.We also pointed out the direction of future work considering some newly emerging problems such as contamination in vacuum and the subsurface damage.

关 键 词：激光损伤阈值 光学薄膜 缺陷 物理气相沉积 溶胶-凝胶 

分 类 号：O484[理学—固体物理]