纳秒脉冲空气辉光放电等离子体及应用  

Nanosecond-pulsed atmospheric pressure glow discharge plasma and its applications

作　　者：万军[1] 贾向红[1] 宋铭炜[1] 王守国[1] 

机构地区：[1]中国科学院微电子研究所微电子器件与集成技术重点实验室,北京100029

出　　处：《强激光与粒子束》2010年第10期2299-2302,共4页High Power Laser and Particle Beams

基　　金：科技部02重大专项资助课题(2009ZX02037-008);中国科学院微电子研究所所长基金项目

摘　　要：采用基于半导体断路开关的纳秒脉冲高压电源,在两个金属电极之间产生放电区间为1 600mm×100 mm×25 mm的常压辉光空气等离子体。等离子体发生器采用负高压针电极阵列与平板阳极结构,针电极的直径为1 mm,长度为20 mm,针电极之间的间隔为20 mm,针电极与平板零电位之间的距离为25mm,在每个负高压针电极末端周围同时形成圆锥形辉光放电,在平板地电极则形成大面积辉光放电。采用电压探针测量了该新型等离子体的放电特性,结果表明:放电脉冲的上升时间为26 ns,最高脉冲输出峰值电压为27 kV;利用该辉光等离子体对幅宽为1 000 mm聚四氟乙烯薄膜进行了表面改性处理,处理后其表面接触角由原来的124°降到69°,亲水性能大为提高。A nanosecond pulsed high voltage power based on semiconductor opening switch was employed to generate atmospheric pressure glow air plasma between a high voltage needle-array electrode and a grounded plate electrode.The discharge volume was 1 600 mm×100 mm×25 mm.In the plasma generator,conical glow discharges were generated simultaneously at all the needle tips and large area glow discharges were formed at the grounded plate electrode at the same time.The diameter and length of each needle,the space between adjacent needles and the distance from the needle tip to the grounded plate electrode surface were 1,20,20 and 25 mm,respectively.The electrical property of the discharge was studied by measuring the voltage across the discharge with a high voltage probe.The result shows that the rise time of pulse discharge and the highest peak voltage of discharge are 26 ns and 27 kV,respectively.In addition,the surface treatment of polytetrafluoroethylene（PTFE） films of 1 000 mm width by the glow discharge plasma shows that the contact angle of the PTFE films is declined from the original 124° to 69°,which indicates that the hydrophilic property of the PTFE films has a significant enhancement.

关 键 词：纳秒脉冲放电 半导体断路开关 空气辉光等离子体 表面处理 

分 类 号：O646.9[理学—物理化学]