基于温度梯度驱动的液滴传输行为研究  

Study on Transportation Behavior of Droplet Driven by Thermal Gradient

作　　者：高安然[1,2] 李铁[1] 刘翔[1,2] 焦继伟[1] 王跃林[1] 

机构地区：[1]传感技术联合国家重点实验室微系统技术国家级重点实验室中国科学院上海微系统与信息技术研究所,上海200050 [2]中国科学院研究生院,北京100049

出　　处：《测试技术学报》2010年第5期377-380,共4页Journal of Test and Measurement Technology

基　　金：国家重点基础研究发展计划(973)资助项目(2006CB300403);国家高技术研究发展计划(863)资助项目(2007AA03Z308);国家自然基金委创新团队资助项目(60721004)

摘　　要：设计并制作了一种基于温度梯度驱动的液滴传输芯片,以实现对微液滴传输的精确控制.介绍了驱动原理和工艺流程,分析了仿真和实验结果.该芯片利用温度梯度下液滴表面形成的表面张力梯度来传输液滴,采用玻璃作为衬底,Ti为电阻加热器,Au为电极,PECVD氧化硅为介质层,碳氟聚合物为疏水层,实现了器件制作.芯片采用开放式结构,制作工艺简单,操作方便.测试结果表明,驱动功率为0.38 W时,去离子水和硅油的传输速率分别达到0.1 mm/s和1 mm/s.A droplet transporting chip based on thermal gradient actuation was designed and fabricated to manipulate microfluid transportation precisely.The actuation principle and fabrication process were presented,the simulation results and the test results were analyzed.The chip made use of surface tension gradient caused by thermal gradient to transport droplets.The chip composed of glass as the substrate,Ti as the micro-heater,Au film as the pad,PECVD SiO2 as the dielectric layer,and fluorocarbon polymer as the hydrophobic layer,was distinguished with open structure,simple fabrication process and ease to operate.Test results show that the transportation velocities of deionized water and silicon oil are 100 μm/s and 1 mm/s respectively at the power of 0.38 W.

关 键 词：微液滴 温度梯度 表面张力梯度 电阻加热器 开放式结构 

分 类 号：TN915.61[电子电信—通信与信息系统]