调制周期对ZrB_2/WNx纳米多层膜的机械性能和结构的影响  

Effect of modulation period on structure and mechanical properties of ZrB_2/WNx multilayered nanofilms

作　　者：刘广庆[1] 刘孟寅[1] 龚杰[1] 孙延东[1] 李德军[1] 

机构地区：[1]天津师范大学物理与电子信息学院,天津300387

出　　处：《真空》2010年第5期31-34,共4页Vacuum

基　　金：国家自然科学基金(50872094);天津市应用基础及前沿技术研究计划重点项目"以硼化物为主要单质材料的超硬纳米多层强化膜设计与制备"(2010);天津市科技计划国际合作项目(07ZCGHHZ01500)联合资助

摘　　要：本文利用高真空离子束辅助沉积系统(IBAD)在室温下制备了ZrB2、WNx和一系列ZrB2/WNx纳米多层膜,利用XRD、SEM、XP-2台阶仪、纳米力学测试系统表征了薄膜的微结构和机械性能,分析了调制周期对薄膜结构与机械性能的影响。结果表明:ZrB2具有典型的六角相及WNx为六方与立方混合相结构,ZrB2/WNx的多层膜则呈现多晶结构。所有多层膜的纳米硬度与弹性模量值都高于两种个体单层膜材料值。当调制周期Λ=9.6 nm,轰击能量为200 eV时,ZrB2/WNx的多层膜显示出最高的硬度(30.2 GPa)和弹性模量,内应力和划痕测试等机械性能也取得较好的结果。The ZrB2,WNx and a series of ZrB2/WNx multilayered nanofilms were prepared by ultra-high vacuum IBAD at room temperature.XRD,XP-2 profiler,SEM and nanoindenter were employed to investigate the influence of modulation period on the microstructure and mechanical properties of the films.The results indicated that the ZrB2 films have a hexagonal structure and WNx films have a mixed structure of cube with hexagon,while the ZrB2/WNx multilayered films present polycrystalline structure.And all the nanohardnesses and elastic moduli of multilayered films are higher than those of either ZrB2 or WNx films.When the bombarding energy is 200eV and the modulation period 9.6nm,the ZrB2/WNx multilayered film hardness and elastic modulus both come up to maximum,with better results obtained in internal stress and scratch tests.

关 键 词：离子辅助沉积 ZrB2/WNx纳米多层膜 硬度 调制周期 

分 类 号：TG174.444[金属学及工艺—金属表面处理] TG174.4[金属学及工艺—金属学]