用于MEMS传感器的三阶Σ-Δ调制器设计  

Design of Third-Order Sigma-Delta Modulator for MEMS Sensors

作　　者：苏小波[1] 柴旭朝[1] 戴欢[1] 顾晓峰[1] 于宗光[1,2] 

机构地区：[1]江南大学信息工程学院,江苏无锡214122 [2]中国电子科技集团公司第58研究所,江苏无锡214035

出　　处：《微电子学》2010年第5期701-704,共4页Microelectronics

基　　金：教育部新世纪优秀人才支持计划项目(NCET-06-0484);教育部留学回国人员科研启动基金资助项目(教外司留[2008]890);江南大学自主科研计划资助项目(JUSRP20914)

摘　　要：提出一种基于CIFB结构的新型三阶2-1级联Σ-Δ调制器,设计了各级参数和数字校正电路,分析了积分器运算放大器的压摆率对信号带宽的影响;利用Matlab Simulink,对该调制器进行行为级仿真。在过采样率为128、输入信号带宽为50 kHz时,可达到93.8 dB的信噪比和15.30位的精度。该结构具有输入信号低失真的优点,可用于MEMS传感器的数据处理电路。A novel third-order 2-1 cascade sigma-delta modulator was proposed based on CIFB structure.Parameters for each stage were designed,as well as digital correction circuit.Signal-to-noise ratio versus base-band of input signal at different slew rates of integrator was analyzed.Behavioral simulation of the modulator was performed by using Matlab Simulink.At an over-sampling rate of 128X and an input signal bandwidth of 50 kHz,the modulator achieves a signal-to-noise ratio of 93.8 dB and a resolution of 15.30 bits,as well as low-distortion input signal.This modulator can be used in data processing circuit of MEMS sensors.

关 键 词：MEMS传感器 Σ-Δ调制器 CIFB 

分 类 号：TN432[电子电信—微电子学与固体电子学] TN722.77