一种薄膜PCB平面变压器的研究  

A kind of thin film printed circuit board planar transformer

作　　者：梁栋[1] 张怀武[1] 

机构地区：[1]电子科技大学电子薄膜与集成器件国家重点实验室,四川成都610054

出　　处：《电子元件与材料》2010年第9期58-61,共4页Electronic Components And Materials

摘　　要：采用现代化印刷版技术,首先设计制作出一种基于柔性PCB板、线圈宽度为0.2mm、线间距为0.3mm、匝数比为6:18的空心变压器,然后采用直流磁控溅射在其上下表面镀上软磁薄膜,而最终制成了一种薄膜PCB平面变压器。研究了薄膜材料、膜厚等因素对该种变压器性能的影响。结果表明,制得的薄膜PCB平面变压器可以有效工作于4～14MHz的频率范围。采用上述方法制备变压器,可以把变压器从三维变成两维,从而为器件的表面贴装打下基础,并同时满足"更小,更轻,更薄"的要求。Using the modern printed circuit board（PCB） technology,a kind of coreless transformer was printed on flexible board.The line width,line spacing and turn ratio of the coil were 0.2 mm,0.3 mm and 6：18,respectively.Thin film PCB planar transformers were then fabricated by depositing soft magnetic thin film on both sides of the coreless transformer by DC magnetron sputtering.The effects of soft magnetic material,film thickness and other factors on the properties of the planar transformer were studied.The results show that the obtained planar transformers work well in the range from 4 MHz to 14 MHz.When above transformer fabrication method is employed,2D transformer instead of 3D transformer is obtained.This not only makes possible the surface mount of transformer,but also fulfills the requirements of modern electronic industry：smaller,lighter and thinner.

关 键 词：薄膜变压器 软磁薄膜材料 直流磁控溅射 PCB 

分 类 号：TM41[电气工程—电器]