基于剪应力检测的石英微结构及其陀螺效应研究  

A novel quartz micro-structure based on shear stress detection and its gyroscopic effect

作　　者：谢立强[1] 吴学忠[1] 李圣怡[1] 王浩旭[1] 董培涛[1] 

机构地区：[1]国防科学技术大学机电工程与自动化学院,长沙410073

出　　处：《物理学报》2010年第10期6896-6901,共6页Acta Physica Sinica

基　　金：国家自然科学基金重点项目(批准号:51005240)资助的课题~~

摘　　要：为了简化石英陀螺结构侧壁上的电极图形,设计了一种基于剪应力检测Coriolis力的新型石英微结构.通过对剪应力检测方案的分析,微结构侧壁电极的极性单一,采用锥度为15°的锥形梁结构作为敏感梁的设计可以增大敏感梁的检测灵敏度.通过各项异性湿法腐蚀z切石英片的方法制造了微结构样件.测试表明样件的驱动频率约为5.6kHz,大气下的品质因子在5000以上.输出信号频谱的谱线存在Coriolis力信号,验证了设计思想的正确性。In order to simplify sidewall electrode pattern of quartz gyroscope,a novel micro-structure used to sense Coriolis＇ force based on shear stress detection is demonstrated.The approach of shear stress detection is analyzed and the structure of sidewall electrode is a single polarity electrode.A tapered beam with 15° taper designed as the sensing beam can increase its sensitivity.A prototype structure is fabricated by processing z-cut quartz by anisotropic wet etching technique.The prototype has a drive mode frequency of about 5.6 kHz,and the quality factor is over 5000 in atmosphere.The spectrum analysis of the structure＇s output signal reveals the Coriolis force,which validates our new design scheme.

关 键 词：石英陀螺 剪应力检测 CORIOLIS力 

分 类 号：TP211.4[自动化与计算机技术—检测技术与自动化装置]