声表延迟线仿真算法与版图的自动化设计  

Simulation Algorithm and Automated Mask Generation of SAW Delay Lines

作　　者：李昊峰[1] 贾锐[1] 李冬梅[1] 刘明[1] 李维龙[1] 陈晨[1] 朱晨昕[1] 

机构地区：[1]中国科学院微电子研究所,北京100029

出　　处：《压电与声光》2010年第5期717-720,共4页Piezoelectrics & Acoustooptics

基　　金："百人计划"基金资助项目;自然科学基金资助项目(60676001;60706023;90401002;90607022);"九七三"计划基金资助项目(2006CB604904;2009CB939703)

摘　　要：针对单向单相换能器(SPUDT)结构声表面波延迟线,编写了一款进行分析和制作的软件。分析过程为把SPUDT结构换能器看成若干叉指单元组成的网络,根据耦合模(COM)理论并结合等效电路模型得到换能器的混合P矩阵,进而得到器件的频响。同时制作了友好的人机交互界面,能对所设计的器件参数进行修改,并自动生成版图。模拟计算与试验测试结果相符。A platform for simulation of SPUDT SAW delay lines was designed and analyzed by MATLAB.This transducer could be considered as the networks of connection of some units of IDTs and the loss of device could be therefore effectively reduced.Based on the Coupling of Modes （COM） theory and equivalent circuit modal,the mixed matrix（P matrix） of the transducers was deduced,and further,the response of the delay lines could be obtained.User-friendly interface was also made by MATLAB in which the designer could adjust parameters and generate the hard mask of the fingers for photolithograph.The theoretical simulation is found to agree with the experimental results.

关 键 词：声表面波 延迟线 MATLAB仿真 版图 

分 类 号：TN65[电子电信—电路与系统] TP319[自动化与计算机技术—计算机软件与理论]