基于隧道效应的MEMS陀螺仪的研究  

Research of MEMS Gyroscope Based on Tunneling Effect

作　　者：石云波[1,2] 张琼[1] 罗源源[2] 刘俊[1,2] 

机构地区：[1]中北大学电子测试技术国家重点实验室,山西太原030051 [2]中北大学仪器科学与动态测试教育部重点实验室,山西太原030051

出　　处：《压电与声光》2010年第5期750-753,共4页Piezoelectrics & Acoustooptics

基　　金：国家自然科学基金资助项目(50675212)

摘　　要：提出了一种高精度、低量程隧道陀螺仪的新结构,分析了其结构及工作原理;对陀螺进行了必要的仿真,仿真结果与理论推导相接近,这样就实现了隧道效应传感器的高灵敏度与哥氏力测量角速度原理的结合。采用体硅工艺设计了陀螺仪版图,并对其进行流片加工。加工完成后,采用HP4156C高精度半导体参数测试仪对传感器的隧道电流效应进行了测试,并验证了其测试结果;同时,对结构进行失效分析。A new structure of tunneling gyroscope with high-accuracy and low-range was presented in this paper.The structure and the operating principle of the gyroscope have been analyzed.The necessary simulation of this gyroscope has been carried out and the simulation results were similar to the theoretical calculation results.This design has combined the high sensitivity of the tunneling effect sensor with the Coriolis principle.The gyroscope pattern has been designed using the silicon bulk micromachining and has been processed by the tape-out.After processing,its tunneling effect was tested by HP4156C high precise semiconductor parameter test instrumentation and the results was validated.Then the disabled form of the structure was analyzed.

关 键 词：陀螺仪 设计 加工 隧道电流检测 

分 类 号：TP212.1[自动化与计算机技术—检测技术与自动化装置]