基于SEM的压电式微纳操纵系统  

Piezoelectric Micro-Nano Manipulating System Based on SEM

作　　者：李勇滔[1,2] 韩立[1] 殷伯华[1] 吴震[1,2] 刘俊标[1] 

机构地区：[1]中国科学院电工研究所,北京100190 [2]中国科学院研究生院,北京100049

出　　处：《压电与声光》2010年第5期782-785,共4页Piezoelectrics & Acoustooptics

基　　金：国家自然科学基金资助项目(50607018)

摘　　要：微纳操纵系统是当前先进制造技术领域的一个重要发展方向。为了实现在亚微米及纳米尺度下进行实时观测下的操纵,设计了一种基于扫描电镜(SEM)的压电式微纳操纵系统,本系统由数字式环境扫描电子显微镜系统、精密工件台、微纳操作机构、图形发生器和计算机系统组成,采用数字式环境扫描电子显微镜作为微纳操作的观测器,在SEM的样本室内安装微纳操作臂,计算机系统控制微纳操作臂,使其在SEM的实时观测下对放置在精密工件台上的样本进行操纵,并且还可利用图形发生器进行电子束曝光以制备微纳结构。实验证明,本系统不仅能适于在各种环境下进行微纳操纵,且还可制作微纳结构,具有很强的实用性。The micro-nano manipulating system is the main trend in modern advanced manufacturing technology.In order to implement the submicron-and nano-scale operation under real-timely observation,a piezoelectric micro-nano manipulating system based on SEM is designed.This system consists of digital environment scanning electron microscope,precision stage,micro-nano manipulator,pattern generator and computer system,wherein the digital environment scanning electron microscope is used as the monitor for micro-nano manipulation,the micro-nano manipulator is placed in the SEM specimen cabinet,the computer system controls the micro-nano manipulator and enables it to handle the specimen placed on the precision stage under the SEM real-timely observation,and also the pattern generator is used to execute the electron beam lithography for fabricating the micro-nano structures.The experiments on the micro-nano manipulating system have showed that this system not only is suitable to the micro-nano manipulation in various environments,but also can fabricate the micro-nano structures,thus it is useful and efficient.

关 键 词：扫描电镜(SEM) 压电电机 微纳操纵 

分 类 号：TP242.3[自动化与计算机技术—检测技术与自动化装置]