基于混合闭环控制器的三维超微定位平台的研究  

Study on the Performances of 3D Ultra-Micropositioning System Based on Hybrid Controller

作　　者：刘国华[1,2] 李亮玉[1,2] 

机构地区：[1]天津工业大学机械电子学院,天津300160 [2]天津市现代机电装备技术重点实验室,天津300160

出　　处：《压电与声光》2010年第5期800-802,810,共4页Piezoelectrics & Acoustooptics

基　　金：天津市高等学校科技发展基金计划资助项目(2006ZY09);天津市自然科学基金重点基金资助项目(05YFJZJC02100)

摘　　要：提出一种以柔性铰链结构为导向机构、压电陶瓷为驱动器的三维超微定位平台,建立了压电陶瓷迟滞非线性模型,提出基于神经网络模型和模糊PI反馈控制的混合闭环控制器方法以提高系统的定位精度,对三维超微定位平台的阶跃响应和和跟踪误差进行了研究。实验研究表明,混合控制器方法消除了定位平台的残余振荡,提高了其定位速度和定位精度。A 3D ultra-micropositioning platform has been proposed in this paper,which is composed of the flexible hinge mechanism used as the guide mechanism and the piezoelectric actuator used as the driver.The non-linear model of the piezoelectric hysteresis has been established.The hybrid controller method based on the neural network model and the fuzzy proportional integral （PI） feedback control was adopted to improve the positioning accuracy of the ultra-micropositioning system.The step response and the tracking errors have been also studied in this paper.The experimental results showed that the residual oscillation of the positioning platform has been eliminated and the positioning speed and precision have been improved by using the hybrid controller method.

关 键 词：压电陶瓷微位移器 柔性铰链 三维超微定位 迟滞非线性 混合闭环控制器 定位精度 

分 类 号：TH703.8[机械工程—仪器科学与技术]