柱面衍射光栅小转角精密测量方法的研究  

Research on Precise Measurement Method of Small Rotation Angle Based on Cylindrical Phase Grating

作　　者：张新宝[1] 杨增辉[1] 何韦均[1] 

机构地区：[1]华中科技大学机械科学与工程学院,武汉430074

出　　处：《武汉理工大学学报》2010年第15期72-75,共4页Journal of Wuhan University of Technology

基　　金：国家973项目(2007CB714005);湖北省自然科学基金(2009CDB181)

摘　　要：为了实现小转角测量,采用柱面全息衍射光栅干涉型的方法。此方法用光学机械结构直接保证了2个相差90°的信号,同时在单一的光栅上出现的是单一光扫描场。理论分析证明此测量系统具有包容结构误差性能好的特点,当测量范围±5.11°时,测量精度可达0.199″。For measuring small rotation angle precisely,a measurement method based on cylindrical phase grating interferometer is developed.In the method,a special optical and mechanical structure is adopted to ensure to get two opto-electric signals with the phase shift of 90°.And more,there is just one optic spot on the only cylindrical phase grating.The method has good ability to tolerance the error of special optical and mechanical structure is proved by theoretical analysis,so the measurement method can have high measuring precision,0.199″,when the angle measuring range is ±5.11°

关 键 词：全息衍射光栅 转角 光干涉 精密测量 柱面 

分 类 号：TH741[机械工程—光学工程]