基于带宽积分平均衍射效率的多层衍射光学元件设计  

Design of Multi-Layer Diffractive Optical Element with Bandwidth Integral Average Diffraction Efficiency

作　　者：薛常喜[1] 崔庆丰[1] 潘春艳[1] 佟静波[1] 

机构地区：[1]长春理工大学光电工程学院,吉林长春130022

出　　处：《光学学报》2010年第10期3016-3020,共5页Acta Optica Sinica

基　　金：国家自然科学基金(60878030)资助课题

摘　　要：以衍射光学元件(DOE)相位延迟表达式为基础,研究并给出了多层衍射光学元件(MLDOE)的带宽积分平均衍射效率(BIADE)与相应设计波长关系的表达式。在MLDOE的基底材料确定后,由所给出的表达式可以得到最大BIADE及相应的设计波长,由此可以实现MLDOE的BIADE最大化、精确化设计。在0.4～0.7μm可见光波段,以聚甲基丙烯酸酯和聚碳酸酯为基底材料,通过优化得到最大BIADE为99.3%,相应的设计波长为0.435μm和0.598μm,各层谐衍射元件(HDE)的微结构高度分别为16.460μm和12.813μm,所得到的BIADE比以0.4μm和0.7μm为设计波长时高4%。The relation between bandwidth integrated average diffraction efficiency（BIADE） of multi-layer diffractive optical elements（MLDOE） and corresponding phase retardation expression is discussed,and the maximum BIADE and the corresponding design wavelengths are determined when the optical materials are selected,then the design of the BIADE of the MLDOE is realized exactly and maximumly.Based on the principle,to design a MLDOE with（PMMA） and polycarbonate as materials respectively,the maximum BIADE is 99.3% in visible waveband（0.4~0.7 μm）,the corresponding design wavelengths are 0.435 μm and 0.598 μm,the heights of harmonic diffractive element（HDE） are 16.460 μm and 12.813 μm respectively,and the BIADE of the MLDOE designed with this method is 3.9% higher than that with the former method in which design wavelengths are 0.4 μm and 0.7 μm.

关 键 词：衍射光学 多层衍射光学元件 衍射效率 带宽积分平均衍射效率 

分 类 号：O436[机械工程—光学工程] TH74[理学—光学]