微等离子体喷枪及其应用  

Microplasma Jets and Applications

作　　者：韩传余[1,2] 吴瑜[3] 王守国[1,2] 

机构地区：[1]中国科学院微电子研究所 [2]中国科学院微电子器件与集成技术重点实验室,北京100029 [3]武汉科技学院理学院,武汉430073

出　　处：《科技导报》2010年第20期91-96,共6页Science & Technology Review

摘　　要：微等离子体喷枪是一类重要的微等离子体源,已成为近年国际上低温等离子体研究的热点课题之一。与常规等离子体喷枪相比,微等离子喷枪具有低功耗、低温度、高密度等特性。由于电极间隙小,适合于高气压或大气压下运行,因而微等离子体喷枪具有体积小、易于集成、便携等优势。目前研制的微等离子体喷枪主要有直流微空心阴极型、高频微DBD型、射频电容耦合型、射频电感耦合型、微波耦合型等放电形式。现阶段,微等离子体喷枪已在半导体制造领域、生物医学领域、航天推进领域进入了实用化阶段。本研究组研究制作了高频微DBD和射频电容耦合型结构的喷枪,将其应用于光刻胶去胶、材料表面改性及微生物灭菌领域,并对喷枪的放电特性进行了研究。基于本研究组的实验研究,本文综述了已有的各种微等离子体喷枪,介绍了各种微等离子体喷枪的结构和工作原理,以及在不同领域的研究和应用状况。Microplasma jets are an important kind of microplasma sources and involve a significant field of research with respect to low- temperature plasma, which is not fully understood so far. Compared with traditional plasma jets, they consume less energy, and have lower temperature and with higher density of plasma. Moreover, most of microplasma jets can be operated at atmospheric pressure, because the gap between the electrodes is very small. Therefore, they are compact, economic, and portable in actual applications. Microplasma jets have attracted a great interest from scientists in the field of atmospheric pressure plasmas with wide studies world ove~. Several kinds of microplasma jets were proposed： DC microhollow discharging, high frequency micro dielectric barrier discharging, RF inductively coupled discharging, RF capacitively coupled discharging, microwave coupled discharging, to name just a few. Currently the focus is on how to achieve high density of atmospheric pressure plasma by using microwave and RF. And many types of microplasma jets were designed and used in several fields. In the semiconductor industry they are used for thin film deposition, local etching and photoresist stripping. Several types of microplasma jets have been used to sterilize and separate the cells in biomedical industry. In space industry, it is intended to be used to propel the micro space flight and micro satellites. We designed some types of the microplasma jets and measured their characteristics in the laboratory. With them, good results were obtained with respect to photoresist stripping and sterilization. Based on our study of the microplasma jets, this paper reviews the existing microplasma jets, discusses their mechanism and various fields of research and applications.

关 键 词：常压等离子体 微等离子体喷枪 微空心阴极放电 微介质阻挡放电 

分 类 号：TG174.4[金属学及工艺—金属表面处理]