柔性微夹钳的拓扑优化设计及制作工艺  

Topology Optimized Design and Microfabrication of Compliant Microgripper

作　　者：张成[1,2] 禇金奎 张然[1,2] 王文静[1,2] 

机构地区：[1]大连理工大学精密与特种加工教育部重点实验室,大连116024 [2]大连理工大学辽宁省微纳米技术及系统重点实验室,大连116024

出　　处：《机械设计与研究》2010年第5期44-46,49,共4页Machine Design And Research

摘　　要：根据连续体结构拓扑优化技术,采用基于SIMP插值模型的变密度法,以最大输出位移为目标设计了一种新型柔性微夹钳的结构,这种钳体结构新颖,拓扑构型为钳口常闭型,依靠钳体自身回程反力夹持物体,能量消耗少,而且钳口张开范围大,通用性好。文中具体阐述了拓扑优化的设计过程,并对设计结果进行了几何重构,同时对整体电热驱动微夹钳进行了有限元分析,仿真结果验证了设计结果。根据设计结果,采用UV-LIGA技术制作了电热驱动微夹钳。This article designs a new structure of microgripper with the object function of the maximal output displacement using SIMP（Solid Isotropic Microstructures Penalization） artificial material density method based on the theory of topology optimization technology of continuum structures. The topological structure is unfolding-when-driven that consumes less energy because it grips object by the return force,and the microgripper is versatile because of its bigger gripping range. A general process is given to describe the design details. And the result of topology optimization is remodeled. Electro-thermal actuation is used to drive the microgripper. The results of finite element analysis testify the design of topology optimization. Based on the result of design,the microgripper is fabricated by UV-LIGA technology.

关 键 词：拓扑优化 微夹钳 电热驱动 UV-LIGA技术 

分 类 号：TH112.5[机械工程—机械设计及理论]