计量型AFM力曲线功能的开发及其在纳米振动测量中的应用  

Development of Force Curve Function of Dimension AFM and Its Application in Nanometer Vibration Measurement

作　　者：栗大超[1] 邱晗[1] 徐临燕[1] 傅星[1] 胡小唐[1] 

机构地区：[1]天津大学精密测试技术及仪器国家重点实验室,天津300072

出　　处：《纳米技术与精密工程》2010年第5期401-405,共5页Nanotechnology and Precision Engineering

基　　金：国家自然科学基金资助项目(30800239);教育部博士点基金资助项目(20070056075);天津市应用基础与前沿技术研究计划资助项目(07JCYBJC04900);高等学校学科创新引智计划资助项目(B07014)

摘　　要：提出了一种在计量型原子力显微镜(AFM)上开发力曲线功能模块的方法.通过在计量型原子力显微镜上增加可调三角波发生器、信号切换和缓冲电压保护电路,对计量型原子力显微镜的内部驱动信号和外加驱动信号进行了平滑切换,避免了原子力显微镜压电陶瓷驱动器的剧烈变化,实现了计量型原子力显微镜的力曲线功能.采用开发的力曲线模块绘制了计量型原子力显微镜的力曲线图形,基于力曲线功能测量了纳米梁谐振器的离面振动特性,并与显微激光多普勒测振仪的测振结果进行了比对,实验结果表明本文提出的方法和建立的系统是正确的.A method for developing force curve function of dimension AFM was proposed.With addition of adjustable triangular wave generator,signal switching and buffer voltage protection circuit to the dimension AFM,smooth switching of the internal and external driving signals was achieved and the undesirable drastic change of the AFM piezoceramics driver was prevented,so that the force curve function was fulfilled on dimension AFM.The force curve of dimension AFM was drawn using the force curve module developed and the surface vibration features of nanobeam resonator were measured on basis of force curve function module.Comparison of the measurement results between force curve module and micro-laser Doppler proves the correctness of the proposed method and the force curve module system.

关 键 词：计量型原子力显微镜 力曲线 纳米梁谐振器 振动测量 显微激光多普勒 

分 类 号：TH742[机械工程—光学工程] TH825[机械工程—仪器科学与技术]