Complete decoupling rebalance loop design of a micromachined electrostatically suspended gyroscope  

作　　者：肖奇军 陈文元 崔峰 李胜勇 刘超英 张卫平 

机构地区：[1]National Key Laboratory of Nano/Micro Fabrication Technology,Key Laboratory for Thin Film and Microfabrication of Ministry of Education,Institute of Micro and Nano Science and Technology,Shanghai Jiaotong University [2]Faculty of Electronic Information & Mechanical Electrical Engineering,Zhaoqing University

出　　处：《Journal of Harbin Institute of Technology(New Series)》2010年第5期672-678,共7页哈尔滨工业大学学报（英文版）

基　　金：Sponsored by the Pre-weapons Research Fund(Grant No.9140A09020706JW0314);New Teacher Research Fund for the Doctoral Program of HigherEducation of China(Grant No.200802481026)

摘　　要：A micromachined electrostatically suspended gyroscope(MESG)based on UV-LIGA microfabrication process was introduced.By close-loop control,the suspended rotor is kept in null position and through the torque rebalance loop,in which the output control voltages reflects the input angular velocity,a dual-axis input angular velocity can be measured simultaneously.First,the system model of MESG was established by dynamic analysis based on the torque analysis.Then,the rebalance loop under ideal condition is designed using modern control technique.The performance of the designed decoupling rebalance loop was compared with that of conventional proportional integral differential(PID)rebalance loop combined with the compensation loop.In order to realize the decoupling of the output voltages,a compensated decoupling matrix and its difference equation were presented and realized by a digital decoupling method employing digital signal processor(DSP).It was confirmed that the controller could realize the complete decoupling and improve the performance of the gyroscope,which includes merits of fast response speed,low overshoot and good dynamic performance,as the simulation results shown.At last,the circuit and digital realization scheme were given.A micromachined electrostatically suspended gyroscope（MESG）based on UV-LIGA microfabrication process was introduced.By close-loop control,the suspended rotor is kept in null position and through the torque rebalance loop,in which the output control voltages reflects the input angular velocity,a dual-axis input angular velocity can be measured simultaneously.First,the system model of MESG was established by dynamic analysis based on the torque analysis.Then,the rebalance loop under ideal condition is designed using modern control technique.The performance of the designed decoupling rebalance loop was compared with that of conventional proportional integral differential（PID）rebalance loop combined with the compensation loop.In order to realize the decoupling of the output voltages,a compensated decoupling matrix and its difference equation were presented and realized by a digital decoupling method employing digital signal processor（DSP）.It was confirmed that the controller could realize the complete decoupling and improve the performance of the gyroscope,which includes merits of fast response speed,low overshoot and good dynamic performance,as the simulation results shown.At last,the circuit and digital realization scheme were given.

关 键 词：electrostatically suspended MICRO-GYROSCOPE rebalance loop complete decoupling 

分 类 号：U666.1[交通运输工程—船舶及航道工程]