MICRO-GYROSCOPE

作品数:7被引量:8H指数:1
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相关领域:电子电信航空宇航科学技术更多>>
相关作者:周百令王寿荣杨波丁学伟夏敦柱更多>>
相关机构:东南大学哈尔滨工业大学更多>>
相关期刊:《Photonic Sensors》《Chinese Journal of Mechanical Engineering》《Journal of Electromagnetic Analysis and Applications》《Journal of Southeast University(English Edition)》更多>>
相关基金:国家自然科学基金国家高技术研究发展计划更多>>
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MEMS and MOEMS Gyroscopes: A Review被引量:1
《Photonic Sensors》2023年第4期73-98,共26页Wenyi HUANG Xing YAN Sengyu ZHANG Zhe LI Jamal NAHASSAN Dingwei CHEN Guangjun WEN Kai CHEN Guangwei DENG Yongjun HUANG 
This work was supported in part by the National Natural Science Foundation of China(Grant Nos.U2230206,12074058,62371106,and 61971113);the National Key Research and Development Program for Young Scientists(Grant No.2022YFA1405900);the Joint Fund of Ministry of Education(Grant No.8091B022126);the Fundamental Enhancement Program Technology Area Fund(Grant No.2021-JCJQ-JJ-0667);Sichuan Provincial Science and Technology Planning Program of China(Grant Nos.2021YJ0089,2022YFG0230,and 2023YFG0040).
Micro-gyroscopes using micro-electro-mechanical system(MEMS)and micro-optoelectro-mechanical system(MOEMS)are the new-generation and recently well-developed gyroscopes produced by the combinations of the traditional g...
关键词:MICRO-GYROSCOPE MEMS MOEMS angular random walk bias instability 
静电驱动下指数型变截面梁式陀螺仪的非线性特性与分析
《Acta Mechanica Sinica》2023年第3期168-184,共17页张昆鹏 畅兆敏 郝淑英 张琪昌 冯晶晶 
This work was supported by the National Natural Science Foundation of China(Grant No.12072234).
本文设计一类新型的指数型变截面梁式微陀螺,变截面指数梁的宽度与长度的关系为指数函数变化的形式,且指数梁的截面变化因子小于等于零,梁的厚度随梁长仍保持不变.考虑了曲率非线性和惯性非线性对系统的影响,利用扩展哈密顿原理、单模...
关键词:Exponential beam MICRO-GYROSCOPE Nonlinear characteristics BANDWIDTH Sensitivity 
Complete decoupling rebalance loop design of a micromachined electrostatically suspended gyroscope
《Journal of Harbin Institute of Technology(New Series)》2010年第5期672-678,共7页肖奇军 陈文元 崔峰 李胜勇 刘超英 张卫平 
Sponsored by the Pre-weapons Research Fund(Grant No.9140A09020706JW0314);New Teacher Research Fund for the Doctoral Program of HigherEducation of China(Grant No.200802481026)
A micromachined electrostatically suspended gyroscope(MESG)based on UV-LIGA microfabrication process was introduced.By close-loop control,the suspended rotor is kept in null position and through the torque rebalance l...
关键词:electrostatically suspended MICRO-GYROSCOPE rebalance loop complete decoupling 
Drive and Control of Electromagnetic Drive Module on Reciprocally Rotating Disc Used for Micro-Gyroscope
《Journal of Electromagnetic Analysis and Applications》2010年第6期362-371,共10页Nan-Chyuan Tsai Jiun-Sheng Liou Chih-Che Lin Tuan Li 
An innovative 3-phase AC (Alternative Current) drive circuit for the seismic disc in micro-gyroscopes is designed and verified by computer simulations and experiments. The in-plane dynamic model of the seismic disc wi...
关键词:MICRO-GYROSCOPE ELECTROMAGNETIC POLE ANTI-COLLISION DRIVE CIRCUIT 
A novel closed-loop vacuum silicon microgyroscope
《Journal of Southeast University(English Edition)》2009年第1期63-67,共5页夏敦柱 王寿荣 周百令 
The National High Technology Research and Development Program of China (863Program)(No.2002AA812038);the National Defense Pre-Research Support Program (No.41308050109)
A novel closed-loop control strategy of a silicon microgyroscope (SMG) is proposed. The SMG is sealed in metal can package in drive and sense modes and works under the air pressure of 10 Pa. Its quality factor reach...
关键词:silicon micro-gyroscope (SMG) self oscillating dual-channel closed-loop detection scale factor zero bias stability 
Modeling and Analysis of a Micromotor with an Electrostatically Levitated Rotor被引量:5
《Chinese Journal of Mechanical Engineering》2009年第1期1-8,共8页HAN Fengtian WU Qiuping ZHANG Rong 
supported by National Hi-tech Research and Development Program of China (863 Program, Grant No. 2008AA04Z312);National Natural Science Foundation of China (Grant No. 50577036)
The modeling and evaluation of a prototype rotary micromotor where the annular rotor is supported electrostatically in five degrees of freedom is presented in order to study the behavior of this levitated micromotor a...
关键词:electrostatic levitation electrostatic micromotor variable-capacitance motor MICRO-GYROSCOPE 
Quadrature error and offset error suppression circuitry for silicon micro-gyroscope被引量:2
《Journal of Southeast University(English Edition)》2008年第4期487-491,共5页杨波 周百令 王寿荣 
The reasons for inducing quadrature error and offset error are analyzed and the expressions of quadrature error and offset error are induced. The open-loop system analysis indicates that, in order to avoid the appeara...
关键词:silicon micro-gyroscope (SMG) quadrature error offset error closed-loop feedback stability of zero bias 
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