MEMS and MOEMS Gyroscopes: A Review  

作　　者：Wenyi HUANG Xing YAN Sengyu ZHANG Zhe LI Jamal NAHASSAN Dingwei CHEN Guangjun WEN Kai CHEN Guangwei DENG Yongjun HUANG 

机构地区：[1]School of Information and Communication Engineering,Sichuan Provincial Engineering Research Center of Communication Technology for Intelligent IoT,University of Electronic Science and Technology of China,Chengdu 611731,China [2]School of Automation Engineering,University of Electronic Science and Technology of China,Chengdu 611731,China [3]Institute of Fundamental and Frontier Sciences,University of Electronic Science and Technology of China,Chengdu 610054,China

出　　处：《Photonic Sensors》2023年第4期73-98,共26页光子传感器（英文版）

基　　金：This work was supported in part by the National Natural Science Foundation of China(Grant Nos.U2230206,12074058,62371106,and 61971113);the National Key Research and Development Program for Young Scientists(Grant No.2022YFA1405900);the Joint Fund of Ministry of Education(Grant No.8091B022126);the Fundamental Enhancement Program Technology Area Fund(Grant No.2021-JCJQ-JJ-0667);Sichuan Provincial Science and Technology Planning Program of China(Grant Nos.2021YJ0089,2022YFG0230,and 2023YFG0040).

摘　　要：Micro-gyroscopes using micro-electro-mechanical system(MEMS)and micro-optoelectro-mechanical system(MOEMS)are the new-generation and recently well-developed gyroscopes produced by the combinations of the traditional gyroscope technology and MEMS/MOEMS technologies.According to the working principle and used materials,the newly-reported micro-gyroscopes in recent years include the silicon-based micromechanical vibratory gyroscope,hemispherical resonant gyroscope,piezoelectric vibratory gyroscope,suspended rotor gyroscope,microfluidic gyroscope,optical gyroscope,and atomic gyroscope.According to different sensitive structures,the silicon-based micromechanical vibratory gyroscope can also be divided into double frame type,tuning fork type,vibrating ring type,and nested ring type.For those micro-gyroscopes,in recent years,many emerging techniques are proposed and developed to enhance different aspects of performances,such as the sensitivity,angle random walk(ARW),bias instability(BI),and bandwidth.Therefore,this paper will firstly review the main performances and applications of those newly-developed MEMS/MOEMS gyroscopes,then comprehensively summarize and analyze the latest research progress of the micro-gyroscopes mentioned above,and finally discuss the future development trends of MEMS/MOEMS gyroscopes.

关 键 词：MICRO-GYROSCOPE MEMS MOEMS angular random walk bias instability 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]