Exploration of KrF Excimer Laser Pulse Compress  

作　　者：GAO Zhi-xing,TANG xiu-zhang,ZHANG Hai-feng,LU Ze,HU Feng-ming,LI Jing,XIANG Yi-huai,DAI hui 

出　　处：《Annual Report of China Institute of Atomic Energy》2009年第1期257-258,共2页中国原子能科学研究院年报（英文版）

摘　　要：The technique of KrF excimer laser pulse compression was explored.The amplified self emission (ASE) pulse was compressed successfully with two discharge pumped excimer laser.The laser pulse fromThe technique Of KrF excimer laser pulse compression was explored. The amplified self emission （ASE） pulse was compressed successfully with two discharge pumped excimer laser. The laser pulse from Trigex 248 was injected into the oscillator cavity of LPX-150 to quench the atomic in excitated state, a 5.2 ns （FWHM） excimer light pulse with 5 ns risetime was obtained （Fig. 1）. The compressed pulse was injected into the amplifier of LPX-150 with laser queching to keep the laser pulse shape. A 100 mJ laser pulse with 7 ns pulse width was attained successfully. The pulse compression technique with laser quenching can combined with EFISI beam uniformaty technique in the same excimer laser system.

关 键 词：准分子激光脉冲 脉冲压缩技术 KRF 脉冲上升时间 脉冲注入 激光淬火 激发态原子 放电泵浦 

分 类 号：TN253[电子电信—物理电子学] TN957.52