引入周期性维护的基束型装备SPN模型及仿真  

Stochastic Petri Nets in Modeling and Simulation of Cluster Tool with Periodical Maintenance

作　　者：郑秀红[1,2,3] 于海斌[1] 胡静涛[1] 

机构地区：[1]中国科学院沈阳自动化研究所,辽宁沈阳110016 [2]中国科学院研究生院,北京100039 [3]沈阳化工学院计算机科学与技术学院,辽宁沈阳110142

出　　处：《计算机仿真》2010年第11期354-358,共5页Computer Simulation

摘　　要：在研究半导体的过程中,为了提高装备的优化性能,采用随机Petri网构造集束型装备模型,描述了装备的串行加工过程,引入了加工腔体的故障、修复、周期性维护的特性。通过仿真实验,分析实验数据,得出故障率、维护周期、维护时间与装备的晶圆生产周期的关系,还确定了传输时间与加工时间的比值与装备瓶颈变化的关系,实验结论具有一定的实际应用价值。In order to effectively use the cluster tool in semiconductor manufacturing,this paper presents stochastic Petri nets model of cluster tool,the model describes the processes of serial operations and introduces the characteristics of failure,repair,and periodical maintenance of the process chamber.Simulation experiments are designed,the paper analyzes the relationship of the failure rate,the maintenance period,the maintenance time of process chamber and the cycle time,the relationship of the ratio of the transport time and process time and the tool bottleneck based experiment data.The conclusion is useful to the efficient use of the tool.

关 键 词：集束型装备 故障 周期性维护 模型 仿真 

分 类 号：TP202[自动化与计算机技术—检测技术与自动化装置]