激光雷达测距系统中滤光片的制备(英文)  

Fabrication of filter film using in lidar ranging system

作　　者：李珊[1] 付秀华[1] 苏佳妮[1] 赵缨慰[1] 

机构地区：[1]长春理工大学光电工程学院,吉林长春130022

出　　处：《红外与激光工程》2010年第5期853-856,共4页Infrared and Laser Engineering

基　　金：吉林省科技发展计划资助项目(20086012)

摘　　要：针对激光雷达测距系统的使用要求,通过对镀膜材料的光学特性、膜系设计和监控方法的分析,优化工艺参数,采用电子束真空镀膜的方法,同时加离子辅助系统,选用TiO2和SiO2氧化物硬质薄膜材料在HB830颜色玻璃基底上镀制窄带滤光膜。用maclod灵敏度算法分析膜层的相对灵敏度,减小厚度监控误差,改进制备工艺过程,寻求膜系的最佳控制方法。所镀膜层在垂直入射的条件下,905 nm波长的透过率达86%以上,半峰值宽度为23 nm,并且通过提高膜厚控制精度解决了中心波长漂移、膜层吸收等问题。该膜层能够承受激光光源的照射,抵御恶劣的使用环境。Aiming at the requirements of laser radar ranging system, narrow-band pass filter film on the substrate of HB830 optical glass was deposited by means of electronic beam vacuum coating method and ion-beam assisted deposition system. Through analyzing for the optical characters of coating material the film system design and monitoring method, technical parameters were optimized. TiO2 and SiO2 were chosen as the high and low refractive index coating materials in the study. Macleod dynamic sensitivity algorithm was used to analyze the relative sensitivity of every layer. And then optimum controlling method was developed by reducing the thickness monitor error and improving preparation process.Transmittance of oxide coated film at wavelength 905 nm is higher than 86% at vertical incidence. And the FWHM is 23 nm. The problem of central wavelength drift and film absorption are solved by improving the thickness precision of each depositing layer. The film could suffer the laser radiation and other extreme environment.

关 键 词：薄膜 窄带滤光膜 膜厚监控 相对灵敏度 

分 类 号：O484[理学—固体物理]