微通道尺寸对开通道电渗泵性能的影响  

Effect of the Micro-Channel Dimension on Characteristics of the Open-Channel Electroosmotic Pump

作　　者：高杨[1,2] 白竹川[3] 刘婷婷[3] 袁明权[1] 

机构地区：[1]中国工程物理研究院电子工程研究所,四川绵阳621900 [2]重庆大学光电技术及系统教育部重点实验室,重庆400044 [3]西南科技大学信息工程学院,四川绵阳621010

出　　处：《微纳电子技术》2010年第11期684-688,共5页Micronanoelectronic Technology

基　　金：中国工程物理研究院科技发展基金重点课题(2008A0403016);四川省教育厅重大培育项目"硅基微型电渗泵三维阵列流动传热分析及优化设计"(07ZZ038);教育部访问学者基金;西南科技大学研究生教改项目(2007XJJG33)

摘　　要：开通道电渗泵的结构简单,性能优越,制作工艺满足标准MEMS微加工工艺,是实现微泵片上集成应用的重要途径之一,可应用于微电子机械系统中作为液压致动元件。开通道电渗泵的压力流量性能与微通道的尺寸参数有直接关系。首先理论分析了微通道的长度、宽度和高度对开通道电渗流性能的影响,得出了各参数对电渗流性能的影响趋势。应用MEMS CAD软件Coventorware对微通道尺寸的影响进行了数值仿真分析,结果表明:数值仿真得出的结论与理论分析相一致,高深宽比微通道的电渗泵,减小宽度W和深度H有助于提高开通道电渗泵的压力,但流量也随之减小,设计时宽度和深度需折衷取值;长度L只对流量有影响,对压力无影响,通过优化设计微通道的几何尺寸可以使开通道电渗泵的压力和流量性能得以提高。The structure of the open-channel electroosmotic pump is simple and the performance of the micro fluid is superior. The open-channel electroosmotic pumps can be applied by on-chip integration as the devices of the hydraulic actuator component, because they can be fabricated by the standard micromachining process of MEMS. The performance of the open-channel electroos- motic pump has a direct relationship with the dimensions of the micro-channel. The effects of the length, width and height of the micro-channel on the performance of the open-channel eleetroo- smotic pump were analyzed theoretically, and the performance trends of the electroosmotic flow changed with these parameters were concluded. The characteristics of the open-channel electroosmotic pump were simulated, and the effects of the micro-channel dimension were analyzed by Coventerware of MEMS CAD software. The results show that the conclusions of the numerical analysis are consistent with the theoretical results; the pressure of the open-channel electroosmotic pump with high aspect ratio micro-channels increases with the reduction of the width and height; but the flow rate decreases with the reduction, so the value of the width and height must be compro- mised; the length of the micro-channel only effects on the flow rate, and has no effects on the pressure. So the pressure and flow rate of the open-channel electroosmotic pump can be increased through optimizing the dimension of the micro-channels.

关 键 词：微电子机械系统 微流体 电渗泵 微通道 开通道 

分 类 号：O35[理学—流体力学] TH703[理学—力学]