MEMS器件与电路共同仿真原型系统  

Co-simulation of MEMS and circuits in Zeni VLG

作　　者：苑伟政[1] 牛昊彬[1] 常洪龙[1] 马炳和[1] 

机构地区：[1]西北工业大学陕西省微/纳米系统重点实验室,陕西西安710072

出　　处：《光学精密工程》2010年第10期2206-2211,共6页Optics and Precision Engineering

基　　金：国家863高技术研究发展计划资助项目(No.2007AA04Z347;No.2009AA04Z320)

摘　　要：为了预测MEMS器件与电路组成的完整MEMS系统的行为,建立了一个支持MEMS器件与电路共同仿真的原型系统。首先,根据MEMS系统级仿真与模拟电路仿真的共同特性,提出了MEMS器件与电路共同仿真的原理和方法,并依托国产电路仿真平台Zeni VLG建立了共同仿真原型系统的框架结构;然后,分别根据修正节点分析方法和模拟电路行为级建模方法开发了该共同仿真原型系统所必需的两个参数化模型库。通过一个跷跷板式微加速度计分别与其开环电路和闭环带载波电路的共同仿真对原型系统和模型库进行了测试,与国外商业软件Saber对比,开环仿真结果相对误差为2.1%,表明提出的原型系统能够有效进行MEMS器件与电路共同仿真,并且具有较高的精度。To predict the behaviors of the whole Micro-electro mechanical System（MEMS） including MEMS devices and circuits, a prototype system for co-simulating MEMS devices and circuits was established. Firstly, the common characteristics of MEMS system-level simulation and analog circuit simulation were studied,and the principle and the method of co simulating MEMS devices and circuits were presented. Based on the circuit simulation platform Zeni VLG, the frame of the prototype system was established. Then, two parametric model libraries which were essential for the prototype system were also established, respectively, according to the modified nodal analysis method and analog circuit behavioral modeling method. A seesaw accelerometer with an open-loop circuit and a closedloop circuit was used to verify the system and the models. By comparing to the commercial software SaberTM, obtained results indicate that the relative error is 2. 1% in the open loop simulation. The simulation results show that the prototype system could handle co-simulations of MEMS devices and circuits effectively, and has a high accuracy.

关 键 词：微机电系统 接口电路 共同仿真 加速度计 

分 类 号：TN710[电子电信—电路与系统] TH703[机械工程—仪器科学与技术]