基于紫外-可见透过谱的薄膜厚度计算研究  

Research on the Calculation of Film Thickness Based on UV-visible Spectrum

作　　者：张海波[1] 康建波[2] 孙辉[2] 杨定宇[2] 朱兴华[2] 

机构地区：[1]成都信息工程学院网络工程学院,四川成都610225 [2]成都信息工程学院光电技术学院,四川成都610225

出　　处：《西华大学学报（自然科学版）》2010年第6期70-72,99,共4页Journal of Xihua University:Natural Science Edition

基　　金：国家自然科学基金(50902012);四川省应用基础项目(2009JY0087)

摘　　要：测试和控制薄膜的厚度是制备高质量薄膜材料的重要步骤之一。本文根据光谱透过率波动曲线与薄膜厚度间的内在联系,基于曲线拟合方法设计开发了一款计算软件,该程序能读取测试光谱数据并自动计算出薄膜厚度和折射率,程序计算结果与台阶仪测试结果吻合较好,证明本文所开发的软件是正确有效的。The measurement and control of thickness are important steps in the deposition of high-quality films.At present,the film thickness obtained by UV-visible spectra is widely used as a non-invasive method.According to the inherent relationship between the interference fluctuation of UV-Vis transmission and the film thickness,a kind of software was designed based on certain algorithm and fitting method,which can read data of UV-Vis spectra then automatically calculate and output film thickness and refractive index.It is found that the procedure result is in good agreement with the measurement of surface profile,showing considerable reliability.

关 键 词：紫外-可见透过谱 薄膜厚度 曲线拟合 程序设计 

分 类 号：TN304[电子电信—物理电子学]