不同载荷作用下膜基反射镜面形分析和仿真  

Simulation of Surface Shape of Membrane Mirrors under Different Loads

作　　者：张庚生[1,2] 唐敏学[1,2] 陈新华[1,3] 余建军[1,3] 沈为民[1,3] 

机构地区：[1]苏州大学江苏省现代光学技术重点实验室,江苏苏州215006 [2]苏州大学信息光学工程研究所,江苏苏州215006 [3]苏州大学现代光学技术研究所,江苏苏州215006

出　　处：《激光与光电子学进展》2010年第11期60-66,共7页Laser & Optoelectronics Progress

基　　金：国家自然科学基金(60678051;61078043)资助课题

摘　　要：研制膜基反射镜需要解决的关键技术之一是膜基反射镜的面形控制。对自行开发的基于模糊逻辑控制理论的膜基反射镜面形控制系统的结构和功能作了详细介绍。在前期对均匀载荷作用下膜基反射镜面形控制进行理论研究的基础上,进一步对非均匀载荷作用下口径300mm、不同F数的膜基反射镜面形控制进行分析和仿真,并与均匀载荷作用下的仿真结果作了分析和比较。结果表明,非均匀载荷作用下膜基反射镜波前误差的均方根(RMS)值比均匀载荷作用下膜基反射镜波前误差的RMS值降低两个数量级。One of key technologies for the manufacture of membrane mirrors is its surface shape control.The structure and function of a surface shape control system which is developed by our laboratory based on fuzzy logic control theory are described in detail.The surface shape control of membrane mirror under uniform load previously has been theoretically analyzed and simulated.Here a non-uniform load method is analyzed and simulated for the surface shape control of a membrane mirror with 300 mm aperture and different F numbers.The results of the simulation show that the RMS wavefront error of the membrane mirror under non-uniform load can be controlled and improved in two orders of magnitude compared with that of the membrane mirror under uniform load.

关 键 词：膜基反射镜 面形控制 非均匀载荷 波前误差 仿真 

分 类 号：TH751[机械工程—仪器科学与技术]