石英晶体最大双折射率色散特性的椭偏测量  

Ellipsometry measurement for the dispersion of quartz crystal maximum birefringence

作　　者：吕廷芬[1] 李国华[1] 蔡生景[1] 韩培高[1] 彭捍东[1] 

机构地区：[1]曲阜师范大学激光研究所,山东曲阜273165

出　　处：《光电子．激光》2010年第12期1842-1844,共3页Journal of Optoelectronics·Laser

摘　　要：为了测量石英晶体最大双折射率的色散特性,在椭偏光谱仪的水平透射测量模式下,通过对确定厚度的石英波片相位延迟量的精确测量,计算出了石英晶体的最大双折射率值,并进行了误差分析。结果表明:这种方法光路简单、操作方便,屏蔽了光源的不稳定性;双折射率测量精度达到了10-6,比连续偏光干涉法的测量精度提高了1个数量级;实现了对石英晶体的最大双折射率色散特性的连续光谱测量;此方法对其它双折射晶体材料的双折射率色散特性的研究也同样适用。To measure the dispersion of quartz crystal maximum birefringence,the phase delay of quartz wave-plate with a certain thickness is measured under transmission mode of ellipsometer.Then the crystal maximum birefringence is calculated,and the error analysis is also given.The results show that the method is easy and convenient,and shields the instability of the light source.The measurement accuracy is up to 10-6.Compared with the practical and reliable continuous polarization interference method,the accuracy can be improved by an order of magnitude.Meanwhile,the dispersion of crystal maximum birefringence is measured continuously.The method can also be used to study the dispersion of other birefringent crystals.

关 键 词：物理光学 色散 椭偏测量 石英波片 

分 类 号：O436.3[机械工程—光学工程]