半导体双轴力传感器的设计  

Design of semiconductor double axis force transducer

作　　者：徐冬[1] 张宁[1] 董玉荣[1] 卫学峰[1] 

机构地区：[1]中国电子科技集团公司第四十九研究所,黑龙江哈尔滨150001

出　　处：《传感器与微系统》2010年第11期126-127,137,共3页Transducer and Microsystem Technologies

摘　　要：介绍一种半导体双轴力传感器的结构设计与工作原理,并利用ANSYS软件进行了仿真模拟。通过分析,确定了应变计的粘贴部位和应力分布。传感器试验结果表明:该传感器灵敏度优于0.05 V/N,精度达到0.5%FS,零点漂移小于1%FS/h,热零点漂移小于0.5%FS/℃,满足使用要求。The structure design and principle of semiconductor double axis force transducer is introduced, and software ANSYS is used to operate computer simulation. By analyzing, the paste position of strain gauge and distribution of stress were determined. Various environmental experiments were carried out for three transducers, the results show that the sensitivity of transducer is better than 0.05 V/N, the precision reaches 0.5 % FS, the zero drift is less than 1% FS/h, and the thermal zero drift is less than 0.5 % FS/℃. This transducer can satisfy the request of user.

关 键 词：半导体 弹性梁 传感器 设计 

分 类 号：TP212.12[自动化与计算机技术—检测技术与自动化装置]