利用电子散斑相移技术测量物体三维面形的方法  

Shape Measurement Based on Phase-shifting Electronic Speckle Pattern Interferometry

作　　者：赵瑞冬[1] 孙平[1] 

机构地区：[1]山东师范大学物理与电子科学学院,济南250014

出　　处：《光子学报》2010年第11期2045-2048,共4页Acta Photonica Sinica

基　　金：山东省自然科学(Y2008G18)基金资助

摘　　要：为了获得准确的面形测量,提出了一种相移电子散斑干涉技术测量物体面形的测量方法.利用电子散斑干涉产生载波条纹,该载波条纹受到物体表面高度的调制变得弯曲,引起载波条纹相位的变化,可运用相移技术提取物体的相位信息,最后根据高度和相位之间的关系得到物体的面形.介绍了该方法的原理,利用该方法对球冠物体进行了面形测量,证明该方法测量物体面形是可行性的.由于是采用散斑干涉的方法产生干涉条纹,因此该方法测量物体面形具有灵敏度高的优点.In order to obtain accurate measurement of 3-D shape,a shape measurement method using phase-shifting electronic speckle pattern interferometry（ESPI）is proposed.A carrier pattern on the object surface is produced by electronic speckle pattern interferometry.The carrier pattern is curved because of the modulation of the altitude of the object surface,which causes the changes of the phase of the carrier pattern.Then the phase changes of the object surface can be extracted by phase-shifting algorithms.Finally the shape of the object surface can be derived by the relationship between the phase changes and the altitude of the surface.The principle of the proposed method is introduced.Surface of a small ball is tested using the method.The experimental results prove that the phase-shifting electronic speckle pattern interferometry is useful for the measurement of an object surface,and indicate that the method has the virtue of high sensitivity because the carrier pattern is produced by electronic speckle pattern interferometry.

关 键 词：物理光学 电子散斑干涉术 相移 面形测量 

分 类 号：O348[理学—固体力学]