A signal processing method for the friction-based endpoint detection system of a CMP process  

作　　者：徐驰 郭东明 金洙吉 康仁科 

机构地区：[1]Key Laboratory for Precision and Non-Traditional Machining Technology of Ministry of Education,Dalian University of Technology

出　　处：《Journal of Semiconductors》2010年第12期138-142,共5页半导体学报（英文版）

基　　金：Project supported by the Major Program of National Natural Science Foundation of China(No.50390061);the National Science and Technology Major Project,China(No.2009ZX02011)

摘　　要：A signal processing method for the friction-based endpoint detection system of a chemical mechanical polishing （CMP） process is presented. The signal process method uses the wavelet threshold denoising method to reduce the noise contained in the measured original signal, extracts the Kalman filter innovation from the denoised signal as the feature signal, and judges the CMP endpoint based on the feature of the Kalman filter innovation sequence during the CMP process. Applying the signal processing method, the endpoint detection experiments of the Cu CMP process were carried out. The results show that the signal processing method can judge the endpoint of the Cu CMP process.A signal processing method for the friction-based endpoint detection system of a chemical mechanical polishing （CMP） process is presented. The signal process method uses the wavelet threshold denoising method to reduce the noise contained in the measured original signal, extracts the Kalman filter innovation from the denoised signal as the feature signal, and judges the CMP endpoint based on the feature of the Kalman filter innovation sequence during the CMP process. Applying the signal processing method, the endpoint detection experiments of the Cu CMP process were carried out. The results show that the signal processing method can judge the endpoint of the Cu CMP process.

关 键 词：CMP endpoint detection signal processing 

分 类 号：TN305.2[电子电信—物理电子学]