一种以SU-8为流道材料的集成微流体流量传感器设计及制作  

Design and Manufacture of An Integrated Micro Flow Sensor with SU-8 Channel

作　　者：芦琦[1] 陈翔[1] 肖丽君[1] 陈迪[1] 

机构地区：[1]上海交通大学微纳科学技术研究院,上海200240

出　　处：《上海交通大学学报》2010年第11期1519-1523,共5页Journal of Shanghai Jiaotong University

基　　金：国家自然科学基金资助项目(20905047)

摘　　要：根据微流量传感器测热式原理,利用Comsol多物理场模拟仿真软件,对微流量传感器进行模拟仿真,分析了流量传感器的关键参数对其灵敏性的影响.在此基础上,设计了一种集成在微流体管道内的微流量传感器.以离子束刻蚀方法制作微电极,SU-8负光刻胶直接制作流道,将该负光刻胶与聚二甲基硅氧烷(PDMS)进行键合封装.最后,对该微流量传感器进行了流速测试.A micro flow sensor integrated inside the flow channel was manufactured by using SU-8 as the flow channel which integrated electrodes inside and packaged through the bonding between SU-8 and PDMS（polydimethylsiloxane）.According to the calorimetric theory,comsol,a multi-physics simulation and analysis software, was implemented to build the model of thermal micro flow sensor to analyze the key factors＇ influences on its sensitivity.Then a micro flow sensor was designed and manufactured with MEMS technology.Finally,the flow-voltage testing of the micro flow sensor was executed.

关 键 词：流量传感器 负光刻胶 微流体 测热式原理 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]