较低倍X射线像的灰级修正  

Modification of X ray image gray scale at lower amplification

作　　者：田地[1,2] 李艳平[1,2] 范国传 王微 于前洋 

机构地区：[1]长春科技大学信息科学与技术学院 [2]中国科学院长春光学精密机械研究所

出　　处：《电子显微学报》1999年第2期238-242,共5页Journal of Chinese Electron Microscopy Society

摘　　要：应用微型计算机直接采集电子探针Ｘ射线像，并用伪彩色显示技术进行观察。发现电子束扫描方式下的低倍Ｘ射线像存在严重失真，并且倍数越低越严重；相同倍数时，谱仪的低波段比高波段严重；不同谱仪上失真方向不同。极低倍Ｘ射线像已无法使用，较低倍Ｘ射线像可以进行灰级修正。修正方法是，在完全相同的实验条件下，分别采集标样和试样中某元素的Ｘ射线像，根据标样Ｘ射线像找出各像素点的修正因子；用该修正因子对试样元素的Ｘ射线像进行逐点的灰级修正，可获得满意的效果。X ray images of electron probe were acquired by a micro computer,and observed in colors.It was found that X ray images at low amplification in beam scanning mode were distorted seriously,the lower the amplification the more serious the distortion,the lower the wavelength on a spectrometer the more serious the distortion,and the distortion direction was different from spectrometer to spectrometer.The X ray images at extremely low amplification were unable to use,but the X ray images at lower amplification could be used with their gray scale modified.The modified method was that we acquired a X ray image of an element from a standard,and found out its distorted ratio factors,then in the same experiment condition,we acquired a X ray image of the element from a sample,and corrected its gray scale in every pixel with the distorted ratio factors.As a result,the modified image from the sample was satisfied.

关 键 词：电子探针 扫描电镜 X射线像 计算机 灰级修正 

分 类 号：P575.1[天文地球—矿物学] TP391.41[天文地球—地质学]