一种非球面超精密单点磨削与形状误差补偿技术  

Ultra-precision Single-point Grinding Technique and Profile Error Compensation Method for Machining Aspheric Mould

作　　者：陈逢军[1,2] 尹韶辉[1,2] 范玉峰[1,2] 朱勇建[1,2] 刘庆[1,2] 

机构地区：[1]湖南大学机械与运载工程学院,长沙410082 [2]湖南大学国家高效磨削工程技术研究中心,长沙410082

出　　处：《机械工程学报》2010年第23期186-191,共6页Journal of Mechanical Engineering

基　　金：国家自然科学基金(50975084;50811120105);国家科技支撑(2007BAF29B03)资助项目

摘　　要：随着各种小型的非球面光学零部件的广泛应用,其成型模具的制造精度要求也日趋提高。针对目前我国尚未完全掌握非球面模具的超精密磨削技术的情况,对超精密单点磨削和形状误差补偿方法进行研究。利用在位接触式的测量系统的测量数据重构实际的磨削轮廓曲线。根据实际磨削轮廓与目标轮廓之间的法向距离,求解出法向残余误差,并提出基于超精密单点斜轴磨削的形状误差补偿方法。利用超精密磨床对口径为6 mm的超硬碳化钨的非球面光学模具进行超精密磨削、在位测量与误差补偿试验,经过两次循环,其形状精度(Peak to valley,PV)从449 nm改善至182 nm。With the widespread application of various small aspheric optical components,high-precision manufacturing technology of forming molds is deeply demanded.However,the ultra-precision grinding technology of small aspheric moulds is still undeveloped in domestic research.An ultra-precision single-point grinding technique and profile error compensation mode of aspheric mould are studied.Through processing the measured data generated from contact on-machine measurement,the actual ground profile is reconstructed.Normal residual error is obtained through calculating the normal distance between actual ground profile and target profile,subsequently,a compensation method of profile error based on ultra-precision single-point inclined axis grinding is proposed.An experimental test is conducted to grind an aspheric tungsten carbide mould of aperture 6 mm,and the profile accuracy is gradually improved from peak to valley 449 nm to 182 nm after two-time compensation cycle.

关 键 词：单点磨削 误差补偿 形状误差 非球面模具 碳化钨磨削 

分 类 号：TG58[金属学及工艺—金属切削加工及机床]